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SEMI C14 : 1995(R2013)

Current

Current

The latest, up-to-date edition.

TEST METHOD FOR PARTICLE SHEDDING PERFORMANCE OF 25 CM GAS FILTER CARTRIDGES

Published date

01-12-2013

Describes a comprehensive standard test sequence to derive particle-related qualification data for 25 cm (10 inch) filter cartridges.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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