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SEMI C21 : 2008

SEMI C21 : 2008

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATIONS AND GUIDELINE FOR AMMONIUM HYDROXIDE

Superseded date

11-06-2018

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Standardizes requirements for ammonium hydroxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C1-4, SEMI C11-1, SEMI C17.1, SEMI C7.1 & SEMI C8-1. (03/2005) Also available in CD-ROM. (06/2008)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

SEMI M51 : 2012 TEST METHOD FOR CHARACTERIZING SILICON WAFER BY GATE OXIDE INTEGRITY

SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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