SEMI C3-6 : 2010(R2015)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR PHOSPHINE (PH3) IN CYLINDERS, 99.98% QUALITY
Superseded date
06-07-2021
Published date
01-12-2013
Gives specifications for phosphine (PH3) that are used in the semiconductor industry.
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