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SEMI C38 : 2012

Current

Current

The latest, up-to-date edition.

GUIDE FOR PHOSPHORUS OXYCHLORIDE

Published date

01-12-2013

Gives a guide for a grade of phosphorus oxychloride for which a need has been identified.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C7.12. (03/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI M51 : 2012 TEST METHOD FOR CHARACTERIZING SILICON WAFER BY GATE OXIDE INTEGRITY

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