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SEMI C44 : 2014

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

SPECIFICATIONS AND GUIDELINES FOR SULFURIC ACID

Superseded date

11-08-2018

Published date

01-12-2013

Describes standardize requirements for sulfuric acid used in the semiconductor industry and testing procedures to support those standards.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C1.16, SEMI C11-5, SEMI C7-8 & SEMI C8.8. (03/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

SEMI C27 : 2018 SPECIFICATIONS AND GUIDELINES FOR HYDROCHLORIC ACID
SEMI C18 : 2014 SPECIFICATION FOR ACETIC ACID
SEMI C35 : 2018 SPECIFICATIONS AND GUIDELINE FOR NITRIC ACID
SEMI C19 : 2014 SPECIFICATION FOR ACETONE
SEMI M51 : 2012 TEST METHOD FOR CHARACTERIZING SILICON WAFER BY GATE OXIDE INTEGRITY

SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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