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SEMI C54 : 2016

SEMI C54 : 2016

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR OXYGEN

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a series of specifications for different grades Of Oxygen (O[2]) that are used in the semiconductor industry.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (09/2002)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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