SEMI D21:2006(R2021)
Current
Current
The latest, up-to-date edition.
Terminology for FPD Mask Pattern Accuracy
Available format(s)
Hardcopy
Language(s)
English
Published date
02-01-2021
This Document defines terminology for FPD masks. By this Standard, it is intended that the concepts of terms which should be used at the technical conferences, business discussion, etc. are clarified and that standardization as to masks will be promoted.
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