SEMI D32 : 2003(R2009)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR IMPROVED INFORMATION MANAGEMENT FOR GLASS FPD SUBSTRATES THROUGH ORIENTATION CORNER UNIFICATION
Published date
01-12-2013
Describes the location, dimensions, and message size of the marking symbol that consists of a two-dimensional code symbol and related alpha numeric characters (capable of being read visually through the reader camera and display) and is located outside of the quality area of glass flat panel display (FPD) substrate.
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