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SEMI E10:2022

Current

Current

The latest, up-to-date edition.

Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization

Published date

04-01-2022

This Specification provides a standardized methodology for measuring reliability, availability, and maintainability (RAM) and utilization performance of equipment in a manufacturing environment.

DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI E140:2022 Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems

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