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SEMI E146 : 2006

Current
Current

The latest, up-to-date edition.

TEST METHOD FOR THE DETERMINATION OF PARTICULATE CONTAMINATION FROM MINIENVIRONMENTS USED FOR STORAGE AND TRANSPORT OF SILICON WAFERS
Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines a test method for the determination of particulate contamination from minienvironments used for storage and transport of silicon wafers in semiconductor manufacturing.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (03/2006)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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