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SEMI E35:2022

SEMI E35:2022

Current

Current

The latest, up-to-date edition.

Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment

Available format(s)

Hardcopy

Language(s)

English

Published date

10-01-2022

Publisher

Semiconductor Equipment & Materials Institute

The purpose of this Guide is to provide standard cost of ownership (COO) metrics for evaluating unit production cost effectiveness of manufacturing equipment in the semiconductor and related industries.

DocumentType
Guide
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI E10 : 2021 SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization

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Hardcopy - English
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