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SEMI E36 : 2004

SEMI E36 : 2004

Current

Current

The latest, up-to-date edition.

SEMICONDUCTOR EQUIPMENT MANUFACTURING INFORMATION TAGGING SPECIFICATION

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Aims to create an information interchange specification, not an authoring specification or an electronic presentation specification. Semiconductor Equipment Manufacturing Information Tagging will define the markup necessary for exchanging documents electronically, for facilitating retrieval of information content, and for validating information interchanges.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E36.1. INACTIVE - Not currently supported by the technical committee. (03/2017)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E149 : 2014 GUIDE FOR EQUIPMENT SUPPLIER-PROVIDED DOCUMENTATION FOR THE ACQUISITION AND USE OF MANUFACTURING EQUIPMENT

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