Name: SEMI E47 : 2001(R2006)
Brand: SEMI

SPECIFICATION FOR 150 MM/200 MM POD HANDLES

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides a unified form and location for pod handles to enable automatic pod handling. Defines the dimensions and location of handles on 150 mm/200 mm pod.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI E47 : 2001(R2006)

SPECIFICATION FOR 150 MM/200 MM POD HANDLES

Abstract

General Product Information

Standards Referenced By This Book

Standards Referencing This Book

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