SEMI E54.11:2016(R2021)
Current
Current
The latest, up-to-date edition.
Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices
Available format(s)
Hardcopy
Language(s)
English
Published date
01-01-1970
This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor/Actuator Network.
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