SEMI E70:2013(R2021)
Current
Current
The latest, up-to-date edition.
Guide for Tool Accommodation Process
Available format(s)
Hardcopy
Language(s)
English
Published date
10-01-2021
This Guide provides an overview of the various elements of Tool Accommodation, a methodology by which semiconductor processing equipment is installed in a cost-effective and timely manner.
Important note : All end users must be registered with an Account prior to user licenses being assigned.Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.