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SEMI E74 : 2001(R2007)

SEMI E74 : 2001(R2007)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR VACUUM PUMP INTERFACES - TURBOMOLECULAR PUMPS

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the physical and electrical interfaces for turbo molecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this standard when procuring processing equipment to specify to the equipment supplier the interface required for interchangeability of pumps.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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