SEMI F100 : 2005
Current
Current
The latest, up-to-date edition.
Describes the relative orifice that gives the minimum flow coefficient for diaphragm valve for Metric PFA tube. Also describes how to verify the flow coefficient of the diaphragm valve by comparing with the relative orifice.
Sorry this product is not available in your region.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.