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SEMI F110 : 2012

SEMI F110 : 2012

Current

Current

The latest, up-to-date edition.

TEST METHOD FOR MONO-DISPERSED POLYSTYRENE LATEX (PSL) CHALLENGE OF LIQUID FILTERS

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a test method for the mono-dispersed polystyrene latex (PSL) challenging of liquid filters.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (08/2012)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
SupersededBy

SEMI C89 : 2016 TEST METHOD FOR PARTICLE REMOVAL PERFORMANCE OF LIQUID FILTER RATED BELOW 30 NM WITH INDUCTIVELY COUPLED PLASMA - MASS SPECTROSCOPY (ICP-MS)
SEMI C82 : 2013 TEST METHOD FOR PARTICLE REMOVAL PERFORMANCE OF LIQUID FILTER RATED 20 TO 50 NM WITH LIQUID-BORNE PARTICLE COUNTER

SEMI F63 : 2016 GUIDE FOR ULTRAPURE WATER USED IN SEMICONDUCTOR PROCESSING

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