SEMI F13 : 2001
Current
Current
The latest, up-to-date edition.
GUIDE FOR GAS SOURCE CONTROL EQUIPMENT
Published date
01-12-2013
Gives a guide for the operational and design requirements of gas source control equipment used to control flow and pressure from a gas cylinder to the point of use. It defines the minimum performance criteria and components for gas control equipment used with HPM (hazardous production material) semiconductor gases.
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