Name: SEMI F48 : 2000(R2014)
Brand: SEMI

TEST METHOD FOR DETERMINING TRACE METALS IN POLYMER MATERIALS

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a procedure for determining the nonvolatile trace inorganic impurities in bulk polymeric materials.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI F48 : 2000(R2014)