SEMI F50 : 2000(R2008)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
GUIDE FOR ELECTRIC UTILITY VOLTAGE SAG PERFORMANCE FOR SEMICONDUCTOR FACTORIES
Superseded date
12-06-2021
Published date
01-12-2013
Provides a framework for semiconductor and flat panel display (FPD) manufacturers and their electric utility service providers to minimize the effect of voltage sag events on semiconductor processing.
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