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SEMI
SEMI F6 : 1992

SEMI F6 : 1992

Current

Current

The latest, up-to-date edition.

GUIDE FOR SECONDARY CONTAINMENT OF HAZARDOUS GAS PIPING SYSTEMS

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives a guide for the fabrication, design and development of secondarily contained distribution piping for HPM (Hazardous production material). It covers the requirements in general for hazardous production material distribution piping for industries under the H-6 Classification of the Uniform Building Code as well as Articles 51/80 of the Uniform fire code etc. It does not cover individual exhausted enclosures ie gas cabinets and valve boxes.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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