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SEMI M35 : 2014

SEMI M35 : 2014

Current

Current

The latest, up-to-date edition.

GUIDE FOR DEVELOPING SPECIFICATIONS FOR SILICON WAFER SURFACE FEATURES DETECTED BY AUTOMATED INSPECTION

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a specification framework for reporting measurements of silicon wafer surface features through the use of scanning (or automated) surface inspection systems (SSIS).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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