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SEMI M73 : 2013

SEMI M73 : 2013

Current

Current

The latest, up-to-date edition.

TEST METHODS FOR EXTRACTING RELEVANT CHARACTERISTICS FROM MEASURED WAFER EDGE PROFILES

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Details two test methods for deriving these characteristics from a measured edge profile.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (10/2008)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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