SEMI MF1366 : 2008(R2013)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TEST METHOD FOR MEASURING OXYGEN CONCENTRATION IN HEAVILY DOPED SILICON SUBSTRATES BY SECONDARY ION MASS SPECTROMETRY
11-16-2023
04-01-2013
Covers the determination of total oxygen concentration in the bulk of single crystal silicon substrates using secondary ion mass spectrometry (SIMS).
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