SEMI MF1390 : 2018
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TEST METHOD FOR MEASURING BOW AND WARP ON SILICON WAFERS BY AUTOMATED NONCONTACT SCANNING
Superseded date
11-04-2023
Published date
01-12-2013
Contains a noncontacting, nondestructive procedure to determine the bow and warp of clean, dry semiconductor wafers.
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