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SEMI MF1617 : 2004(R2016)

SEMI MF1617 : 2004(R2016)

Current

Current

The latest, up-to-date edition.

TEST METHOD FOR MEASURING SURFACE SODIUM, ALUMINUM, POTASSIUM, AND IRON ON SILICON AND EPI SUBSTRATES BY SECONDARY ION MASS SPECTROMETRY

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the determination of total sodium, aluminum, potassium, and iron on the surface of mirror-polished single crystal silicon and silicon epi substrates using SIMS.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2004)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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