SEMI MF1811 : JAN 2016

Name: SEMI MF1811 : JAN 2016
Brand: SEMI

Superseded

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GUIDE FOR ESTIMATING THE POWER SPECTRAL DENSITY FUNCTION AND RELATED FINISH PARAMETERS FROM SURFACE PROFILE DATA

Superseded date

12-11-2021

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the methodology for calculating a set of commonly used statistical parameters and functions of surface roughness from a set of measured surface profile data.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (01/2005)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI MF1811:2016(R2021)

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SEMI MF1811 : JAN 2016

GUIDE FOR ESTIMATING THE POWER SPECTRAL DENSITY FUNCTION AND RELATED FINISH PARAMETERS FROM SURFACE PROFILE DATA

Abstract

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Standards Referencing This Book

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