Name: SEMI MF26 : 2014E
Brand: SEMI

TEST METHOD FOR DETERMINING THE ORIENTATION OF A SEMICONDUCTIVE SINGLE CRYSTAL

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Gives techniques for determining the crystallographic orientation of a surface which is roughly parallel to a low-index atomic plane in single crystals used primarily for semiconductor devices.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2005) E = This standard was editorially modified in November 2017 to correct editorial errors. (01/2018)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

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SEMI MF26 : 2014E

TEST METHOD FOR DETERMINING THE ORIENTATION OF A SEMICONDUCTIVE SINGLE CRYSTAL

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