SEMI MF978 : 2006(R2017)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
TEST METHOD FOR CHARACTERIZING SEMICONDUCTOR DEEP LEVELS BY TRANSIENT CAPACITANCE TECHNIQUES
07-04-2022
01-12-2013
Covers three procedures for determining the density, activation energy, and prefactor of the exponential expression for the emission rate of deep-level defect centers in semiconductor depletion regions by transient-capacitance techniques.
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