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SEMI PV28 : 2016

SEMI PV28 : 2016

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Current

The latest, up-to-date edition.

TEST METHOD FOR MEASURING RESISTIVITY OR SHEET RESISTANCE WITH A SINGLE-SIDED NONCONTACT EDDY-CURRENT GAUGE

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the principles of eddy-current measurements as they relate to silicon bricks and ingots or silicon films on nonconductive substrates that are used in photovoltaic sensors.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (03/2012)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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