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SEMI S6 : 2007E

SEMI S6 : 2007E

Current

Current

The latest, up-to-date edition.

EHS GUIDELINE FOR EXHAUST VENTILATION OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

Published date

01-12-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides safety performance criteria for exhaust ventilation of semiconductor manufacturing equipment (SME) and test methods for assessing conformance to those criteria.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (01/2003) Also available in CD-ROM. (06/2007) E = This standard was editorially modified to correct an error. (12/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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