SS-EN ISO 14644-9 : 2012
Current
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration
Available format(s)
Hardcopy
Language(s)
English
Published date
08-22-2012
Publisher
ISO 14644-9:2012 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications.
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