UNE-EN 62047-12:2011
Current
Current
The latest, up-to-date edition.
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures (Endorsed by AENOR in February of 2012.)
Available format(s)
Hardcopy , PDF
Language(s)
English
Published date
02-01-2012
Publisher
| Committee |
CTN 209/SC 47
|
| DocumentType |
Standard
|
| Pages |
33
|
| PublisherName |
Asociacion Espanola de Normalizacion
|
| Status |
Current
|
Important note : All end users must be registered with an Account prior to user licenses being assigned.Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.