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VDI 2083 Blatt 13.2:2009-01

Current
Current

The latest, up-to-date edition.

Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications
Available format(s)

Hardcopy , PDF

Language(s)

German - English

Published date

01-01-2009

Preliminary note
Introduction
1. Scope
2. Normative references
3. Terms and definitions
4. Raw water
5. Basic operations of ultrapure-water production
6. Specification of ultrapure water for the
    microelectronics industry
7. Typical plant layouts (including materials and
    components)
8. Ultrapure-water distribution
9. Installation, commissioning and acceptance
10. Project handling and documentation
11. Operation and quality monitoring
12. Reuse
Bibliography
Index

This guideline aims to compile the existing expertise regarding the planning, construction, operation and monitoring of water-processing installations for the production of ultrapure water.

DocumentType
Standard
Pages
52
PublisherName
Verlag des Vereins Deutscher Ingenieure
Status
Current
Supersedes

VDI 2083 Blatt 17:2013-06 Cleanroom technology - Compatibility of materials with the required cleanliness
VDI 2083 Blatt 3.1:2012-06 Cleanroom technology - Metrology in cleanroom air - Monitoring
VDI 2083 Blatt 13.3:2010-10 Cleanroom technology - Quality, production, and distribution of ultrapure water - Pharmacy and other life-science applications
VDI 2083 Blatt 8.1:2014-10 Cleanroom technology - Air cleanliness chemical concentration (ACC)
VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes
VDI 2083 Blatt 4.2:2011-04 Cleanroom technology - Energy efficiency
VDI 2083 Blatt 13.1:2009-01 Cleanroom technology - Quality, production and distribution of ultrapure water - Fundamentals
VDI 2083 Blatt 16.1:2010-08 Cleanroom technology - Barier systems (isolators, mini-environments, separative devices) - Effectiveness and certification
VDI 2083 Blatt 7:2015-10 Cleanroom technology - Ultrapure media - Quality, supply, distribution

EN ISO 6520-1:2007 Welding and allied processes - Classification of geometric imperfections in metallic materials - Part 1: Fusion welding (ISO 6520-1:2007)
EN ISO 5817:2014 Welding - Fusion-welded joints in steel, nickel, titanium and their alloys (beam welding excluded) - Quality levels for imperfections (ISO 5817:2014)
DIN EN ISO 14644-1:2016-06 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-1:2015)
DIN 11850:2009-02 STAINLESS STEEL TUBES FOR THE FOOD AND CHEMICAL INDUSTRIES - DIMENSIONS, MATERIALS
DIN 4046:1983-09 WATER-SUPPLY - TERMS - DVGW CODE OF PRACTICE
VDI 2083 Blatt 11:2008-01 Cleanroom technology - Quality assurance
DIN 25416-2:1983-01 FACILITIES FOR TREATMENT FOR RADIOACTIVE CONTAMINATED WATER IN NUCLEAR POWER PLANTS - METHODS
DIN 11864-1:2016-10 (Draft) STAINLESS STEEL COMPONENTS FOR ASEPTIC APPLICATIONS IN THE CHEMICAL AND THE PHARMACEUTICAL INDUSTRIES - PART 1: CONNECTIONS
ISO 6520-1:2007 Welding and allied processes Classification of geometric imperfections in metallic materials Part 1: Fusion welding
ISO 14160:2011 Sterilization of health care products Liquid chemical sterilizing agents for single-use medical devices utilizing animal tissues and their derivatives Requirements for characterization, development, validation and routine control of a sterilization process for medical devices
EN 12829:2011 Surface active agents - Preparation of water with known calcium and magnesium hardness
DIN 1314:1977-02 PRESSURE; BASIC CONCEPTS, UNITS
VDI 2083 Blatt 3:2005-07 Cleanroom technology - Metrology and test methods
VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes
EN ISO 7027 : 1999 WATER QUALITY - DETERMINATION OF TURBIDITY
SEMI E75 : 1998 PROVISIONAL MECHANICAL SPECIFICATION FOR BOX/POD COMPATIBLE CASSETTES USED TO TRANSPORT AND STORE 300-MM WAFERS
VDI 2083 Blatt 10:1998-02 Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems
DIN EN ISO 17664:2016-06 (Draft) PROCESSING OF HEALTH CARE PRODUCTS - INFORMATION TO BE PROVIDED BY THE MEDICAL DEVICE MANUFACTURER FOR THE PROCESSING OF MEDICAL DEVICES (ISO 17664:2017)
DIN 54400:2015-05 ION EXCHANGE - TERMINOLOGY
ISO 2174:1990 Surface active agents Preparation of water with known calcium hardness
ISO 14644-5:2004 Cleanrooms and associated controlled environments — Part 5: Operations
EN 14743:2005+A1:2007 Water conditioning equipment inside buildings - Softeners - Requirements for performance, safety and testing
VDI 2083 Blatt 12:2000-01 Cleanroom technology - Safety and environmental aspects
VDI 2083 Blatt 13.1:2009-01 Cleanroom technology - Quality, production and distribution of ultrapure water - Fundamentals
DIN EN 12829:2011-07 Surface active agents - Preparation of water with known calcium and magnesium hardness
EN 1717:2000 Protection against pollution of potable water in water installations and general requirements of devices to prevent pollution by backflow
EN ISO 4833 : 2003 MICROBIOLOGY OF FOOD AND ANIMAL FEEDING STUFFS - HORIZONTAL METHOD FOR THE ENUMERATION OF MICROORGANISMS - COLONY-COUNT TECHNIQUE AT 30 DEGREE C
VDI 2083 Blatt 4.1:2006-10 Cleanroom technology - Planning, construction and start-up of cleanrooms
VDI 2083 Blatt 15:2007-04 Cleanroom technology - Personnel at the clean work place
ISO 10931:2005 Plastics piping systems for industrial applications Poly(vinylidene fluoride) (PVDF) Specifications for components and the system
DIN 11864-2:2016-10 (Draft) STAINLESS STEEL COMPONENTS FOR ASEPTIC APPLICATIONS IN THE CHEMICAL AND THE PHARMACEUTICAL INDUSTRIES - PART 2: FLANGE CONNECTIONS
DIN 38404-3:2005-07 German standard methods for the examination of water, waste water and sludge - Physical and physical-chemical parameters (group C) - Part 3: Determination of spectral absorption in the UV range, spectral absorption coefficient (C 3)
SEMI E49.3 : 1998 GUIDE FOR ULTRAHIGH PURITY DEIONIZED WATER AND CHEMICAL DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
DIN EN 14743:2007-09 WATER CONDITIONING EQUIPMENT INSIDE BUILDINGS - SOFTENERS - REQUIREMENTS FOR PERFORMANCE, SAFETY AND TESTING
VDI 1000:2017-02 VDI Standardisation Work - Principles and procedures
EN 13098:2000 Workplace atmosphere - Guidelines for measurement of airborne micro-organisms and endotoxin
DIN EN 10204:2005-01 Metallic products - Types of inspection documents; German version EN 10204:2004
DIN 32736:2000-08 Building Management - Definitions and scope of services
DIN 32676:2009-05 Fittings for the food, chemical and pharmaceutical industries - Clamp connections for stainless steel tubes - Weld-on type
EN ISO 14644-5:2004 Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004)
EN 14652:2005+A1:2007 Water conditioning equipment inside buildings - Membrane separation devices - Requirements for performance, safety and testing
VDI 2083 Blatt 5.1:2007-09 Cleanroom technology - Cleanroom operation
DIN EN ISO 7027:2000-04 WATER QUALITY - DETERMINATION OF TURBIDITY
EN 10204:2004 Metallic products - Types of inspection documents
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
VDI 2083 Blatt 7:2015-10 Cleanroom technology - Ultrapure media - Quality, supply, distribution
DIN 38404-10:2012-12 GERMAN STANDARD METHODS FOR THE EXAMINATION OF WATER, WASTE WATER AND SLUDGE - PHYSICAL AND PHYSICO-CHEMICAL PARAMETERS (GROUP C) - PART 10: CALCULATION OF THE CALCIT SATURATION OF WATER (C 10)
DIN EN ISO 14160:2011-10 Sterilization of health care products - Liquid chemical sterilizing agents for single-use medical devices utilizing animal tissues and their derivatives - Requirements for characterization, development, validation and routine control of a sterilization process for medical devices (ISO 14160:2011)
VDI 2083 Blatt 9:1991-09 (Draft) Clean room engineering; quality, production and distribution of superpurity water
VDI 2083 Blatt 5.2:2008-10 Cleanroom technology - Cleanroom operation - Decontamination of multiple-use cleanroom clothing
EN 1418:1997 Welding personnel - Approval testing of welding operators for fusion welding and resistance weld setters for fully mechanized and automatic welding of metallic materials
EN ISO 10931:2005/A1:2015 Plastics piping systems for industrial applications - Poly(vinylidene fluoride) (PVDF) - Specifications for components and the system (ISO 10931:2005/FDAM 1:2015)
DIN EN ISO 10931:2015-11 PLASTICS PIPING SYSTEMS FOR INDUSTRIAL APPLICATIONS - POLY(VINYLIDENE FLUORIDE) (PVDF) - SPECIFICATIONS FOR COMPONENTS AND THE SYSTEM (ISO 10931:2005 + AMD 1:2015)
EN ISO 14644-1:2015 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)
ISO 17664:2017 Processing of health care products Information to be provided by the medical device manufacturer for the processing of medical devices
EN ISO 14160:2011 Sterilization of health care products - Liquid chemical sterilizing agents for single-use medical devices utilizing animal tissues and their derivatives - Requirements for characterization, development, validation and routine control of a sterilization process for medical devices (ISO 14160:2011)
DIN EN 1717:2011-08 Protection against pollution of potable water installations and general requirements of devices to prevent pollution by backflow
ISO 7027:1999 Water quality Determination of turbidity

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