Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement

Available format(s)

Hardcopy , PDF

Language(s)

German - English

Published date

10-01-2010

Publisher

Verlag des Vereins Deutscher Ingenieure

Preliminary note
Introduction
1 Scope
2 Terms and definitions
3 Symbols and subscripts
4 Properties of confocal
microscopes
5 Calibration and specification
6 Report of results of the
instrument calibration
7 Measurement uncertainty
Bibliography

The guideline describes procedures for the calibration of imaging confocal microscopes and depth setting standards for roughness measurement and thus forms the basis for the traceability of measuring systems to national standards.

DevelopmentNote	Supersedes VDE-VDI 2604. (10/2010)
DocumentType	Standard
Pages	36
PublisherName	Verlag des Vereins Deutscher Ingenieure
Status	Current
Supersedes	VDE-VDI 2604 : 1971 VDI/VDE 2655 Blatt 1.2:2009-09 (Draft) VDE/VDI 2604;VDI/VDE 2604:1971-06

EN ISO 4287:1998/A1:2009	GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - TERMS, DEFINITIONS AND SURFACE TEXTURE PARAMETERS
ISO 12179:2000	Geometrical Product Specifications (GPS) Surface texture: Profile method Calibration of contact (stylus) instruments
ISO 4287:1997	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
EN ISO 4288 : 1997	GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - RULES AND PROCEDURES FOR THE ASSESSMENT OF SURFACE TEXTURE
EN ISO 12179:2000/AC:2008	GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - CALIBRATION OF CONTACT (STYLUS) INSTRUMENTS
EN ISO 11562:1997/AC:2008	GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - METROLOGICAL CHARACTERISTICS OF PHASE CORRECT FILTERS
VDI 1000:2017-02	VDI Standardisation Work - Principles and procedures
ISO 3274:1996	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
ISO 12853:2015	Microscopes Information provided to the user
ENV 13005 : DRAFT 1999	GUIDE TO THE EXPRESSION OF UNCERTAINTY IN MEASUREMENT
ISO 5436-1:2000	Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures
DIN EN ISO 11562:1998-09	GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - METROLOGICAL CHARACTERISTICS OF PHASE CORRECT FILTERS
EN ISO 3274 : 1997	GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - NOMINAL CHARACTERISTICS OF CONTACT (STYLUS) INSTRUMENTS
DKD-3 : 1998	EXPRESSION OF THE UNCERTAINTY OF MEASUREMENT IN CALIBRATION