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16/30326493 DC : 0

NA
NA

Status of Standard is Unknown

BS EN ISO 14644-3 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 3: TEST METHODS
Available format(s)

Hardcopy , PDF

Language(s)

English

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Test procedures
5 Test reports
Annex A (informative) - Choice of supporting
        tests and checklist
Annex B (informative) - Supporting test methods
Annex C (informative) - Test apparatus
Bibliography

BS EN ISO 14644-3.

Committee
LBI/30
DocumentType
Draft
Pages
81
PublisherName
British Standards Institution
Status
NA

IEST RP CC021.4 : 2016 TESTING HEPA AND ULPA FILTER MEDIA
ISO 5167-3:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 3: Nozzles and Venturi nozzles
IEST RP CC034.4 : 2016 HEPA AND ULPA FILTER LEAK TESTS
ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
ASTM F 328 : 1998 Standard Practice for Calibration of an Airborne Particle Counter Using Monodisperse Spherical Particles
ISO 14644-2:2015 Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
IEST RP CC007.3 : 2016 TESTING ULPA FILTERS
IEST RP CC006.3 : 2004 TESTING CLEANROOMS
EN 12599:2012 Ventilation for buildings - Test procedures and measurement methods to hand over air conditioning and ventilation systems
ISO 7726:1998 Ergonomics of the thermal environment Instruments for measuring physical quantities
ISO 5167-4:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 4: Venturi tubes
SEMI E14 : 1993 MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL
EN 1822-2:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 2: Aerosol production, measuring equipment, particle counting statistics
ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM)
ISO 5167-2:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 2: Orifice plates
IEST G CC1001 : 1999 COUNTING AIRBORNE PARTICLES FOR CLASSIFICATION AND MONITORING OF CLEANROOMS AND CLEAN ZONES
ISO 5167-1:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 1: General principles and requirements
ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
IEST G CC1003 : 1999 MEASUREMENT OF AIRBORNE MACROPARTICLES
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
IEST G CC1002 : 1999 DETERMINATION OF THE CONCENTRATION OF AIRBORNE ULTRAFINE PARTICLES
ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
ISO 21501-4:2007 Determination of particle size distribution Single particle light interaction methods Part 4: Light scattering airborne particle counter for clean spaces
EN 1822-4:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 4: Determining leakage of filter elements (scan method)
ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)
ISO 14644-9:2012 Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration
IEST RP CC001.6 : 2016 HEPA AND ULPA FILTERS

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