Terminology Relating to Measurements Taken on Thin, Reflecting Films

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

31-12-2010

Publisher

American Society for Testing and Materials

1.1 This standard consists of terms and definitions pertaining to measurements taken on thin, reflecting films, such as found in microelectromechanical systems (MEMS) materials. In particular, the terms are related to the standards in Section , which were generated by Committee E08 on Fatigue and Fracture. Terminology E 1823 Relating to Fatigue and Fracture Testing is applicable to this standard.

1.2 The terms are listed in alphabetical order.

Committee	E 08
DocumentType	Reference Material
Pages	3
PublisherName	American Society for Testing and Materials
Status	NA
SupersededBy	ASTM E 2444 : 2005 : EDT 1

ASTM E 2244 : 2011 : R2018	Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer (Withdrawn 2023)
ASTM E 2246 : 2011 : R2018	Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer (Withdrawn 2023)
ASTM E 2245 : 2011 : R2018	Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer (Withdrawn 2023)