Customer Support: 131 242

i2i Intertek.com
  • There are no items in your cart
We noticed you’re not on the correct regional site. Switch to our AMERICAS site for the best experience.
Go to AMERICAS site
Dismiss alert
Please enter a keyword to search
Advanced search
Home
ASTM
ASTM F 1709 : 1997 : R2016

ASTM F 1709 : 1997 : R2016

Current

Current

The latest, up-to-date edition.

Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications (Withdrawn 2023)

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

16-05-2016

Publisher

American Society for Testing and Materials

CONTAINED IN VOL. 10.04, 2016 Defines pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.1This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2This standard sets purity grade levels, physical attributes, analytical methods, and packaging.

1.2.1The grade designation is a measure of total metallic impurity content. The grade designation does not necessarily indicate suitability for a particular application because factors other than total metallic impurity may influence performance.

Committee
F 01
DocumentType
Standard
Pages
3
ProductNote
Reconfirmed 2016
PublisherName
American Society for Testing and Materials
Status
Current
Supersedes

ASTM F 3166 : 2016 Standard Specification for High-Purity Titanium Sputtering Target Used for Through-Silicon Vias (TSV) Metallization (Withdrawn 2023)

ASTM E 112 : 2013 : R2021 Standard Test Methods for Determining Average Grain Size
ASTM E 112 : 2013 Standard Test Methods for Determining Average Grain Size

View more information
$110.51
Including GST where applicable
AUD
CAD
CHF
CNY
DKK
EUR
GBP
HKD
IDR
INR
JPY
KRW
MXN
NOK
NZD
SEK
SGD
USD
ZAR
Hardcopy - English
PDF - English
01
02
03
04
05
06
07
08
09
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.

Learn more on subscription solutions

or

Get in touch with us

Need help?
Call us on 131 242, then click here to start a Screen Sharing session
so we can help right away! Learn more