BS ISO 14976:1998

Foreword
Introduction
1 Scope
2 Description of the format
      2.1 General
      2.2 The Components of the metalanguage
      2.3 Additional rules
      2.4 The format
      2.5 Specification of the spectrometer geometry
Annex A (informative) Design of the format
Annex B (informative) Examples of the format
      B.1 - General
      B.2 - Archetypal applications
      B.3 - Annotated examples
Annex C (informative) Partially encoded versions of the
                      format
      C.1 - General
      C.2 - An experiment involving a number of regularly-
            scanned spectra or spectral regions for one
            technique as a function of one experimental
            variable, the analysis not being at a
            specifically-addressed point on the sample
      C.3 - An experiment involving a number of regularly-
            scanned spectral regions as a function of
            sputtering as in a sputter depth profile by
            one technique such as AES or SIMS, the analysis
            not being at a particularly addressed point on
            the sample
      C.4 - An experiment involving a number of maps of
            single values representing the intensities of
            different elements for one technique such as
            AES, EDX or SIMS, the maps to be made of
            x-linescans starting at (1,1) and varying with
            one experimental variable
Annex D (informative) Bibliography
Figure 1 - The relationship of geometrical orientations for
           specifying angular values
Figure A.1 - An XPS spectrum of one region over 25 eV
             around the C1s peak. This illustrates the
             example in B.2.1
Figure A.2 - A SIMS map of one element setting the mass
             spectrometer to 45 amu. This illustrates the
             first block of the example in B.2.3
Figure A.3 - An AES cyclic sputter depth profile at one
             point with differential spectrum single values
             for each of three elements over 1000 depths
             lasting eight hours. This illustrates the
             example in B.2.6
Figure A.4 - An AES map for four elements which may be
             transferred as one block. The data for the
             four elements may be transferred sequentially
             at each point, the counts for the elements
             being corresponding variables