DS/EN ISO 23216:2022
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Carbon based films – Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)
15-11-2022
This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
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