IEC 62047-1:2005
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Hardcopy , PDF 1 User , PDF 3 Users , PDF 5 Users , PDF 9 Users
12-09-2022
English - French, Russian
27-09-2005
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
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