NEN EN ISO 14644-8 : 2013
Current
The latest, up-to-date edition.
CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ACC)
12-01-2013
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Demonstration of compliance
Annex A (informative) Parameters for consideration
Annex B (informative) Typical contaminants
Annex C (informative) Typical methods of measurement
Annex D (informative) Consideration of specific
requirements for separative devices
Bibliography
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