PD ISO/TS 20175:2018
Current
The latest, up-to-date edition.
Vacuum technology. Vacuum gauges. Characterization of quadrupole mass spectrometers for partial pressure measurement
Hardcopy , PDF
English
08-05-2018
This document describes procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic mass-to-charge ratios m/z
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