SEMI C23 : 2014
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATIONS FOR BUFFERED OXIDE ETCHANTS
05-10-2020
12-01-2013
Describes requirements for buffered oxide etchants used in the semiconductor industry and testing procedures to support those standards.
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