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SEMI
SEMI C25 : 2012

SEMI C25 : 2012

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR DICHLOROMETHANE (METHYLENE CHLORIDE)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides the requirements for dichloromethane (methylene chloride) used in the semiconductor industry and testing procedures to support those standards.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2005) Supersedes SEMI C1-6. (03/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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