Name: SEMI C37 : 2006(R2011)
Brand: SEMI

SPECIFICATION FOR PHOSPHORIC ETCHANTS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes requirements for phosphoric etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C2-3. (03/2005) Also available in CD-ROM. (07/2006)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current
Supersedes	SEMI C2-3 : 1995

SEMI C2 : 1995	SPECIFICATIONS FOR ETCHANTS
SEMI C1 : 2010	GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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SEMI C37 : 2006(R2011)

SPECIFICATION FOR PHOSPHORIC ETCHANTS

Abstract

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