SEMI C45 : 2009E
Current
The latest, up-to-date edition.
SPECIFICATION AND GUIDELINE FOR TETRAETHYLORTHOSILICATE (TEOS)
12-01-2013
Specifies requirements for tetraethylorthosilicate used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Related to all grades of tetraethylorthosilicate used in the semiconductor industry.
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