Name: SEMI E54.14 : 2009
Brand: SEMI

SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR PROFINET

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Defines a specific communications protocol based on the PROFINET standard.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (02/2005) No longer published within the SEMI E54 family of standards. Published and sold separately on its own page. (02/2009)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

SEMI E54.1 : 2016	SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMON DEVICE MODEL
SEMI E54.18 : 2014	SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PUMP DEVICE
SEMI E54.3 : 1998(R2016)	SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR MASS FLOW DEVICE
SEMI E54.10 : 2000(R2017)	SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR AN IN-SITU PARTICLE MONITOR DEVICE
SEMI E54.11 : 2016	SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR ENDPOINT DEVICES
SEMI E39 : 2003(R2014)	OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES

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SEMI E54.14 : 2009