SEMI E54.15 : 2007
Current
The latest, up-to-date edition.
SENSOR ACTUATOR NETWORK COMMUNICATION SPECIFICATION FOR SAFETYBUS P
12-01-2013
Defines a communication specification based on the SafetyBUS p protocol to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing equipment.
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